Grant Revenue Commitment to Project

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- Definition

Ownership Rights, Results of Projects Developed Separately By Individual Parties

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- Definition

Percentage of Voting Interest of Acquiree Owned Subsidiary

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- Definition

Research and Development Agreement Term

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- Definition

Research and Development, Period Required for Equipment Repairs and Maintenance

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- Definition

Research and Development, Required Contribution, Labor and Assets

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- Definition

The percentage of ownership of common stock or equity participation in the investee accounted for under the equity method of accounting.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 323

-SubTopic 10

-Section 50

-Paragraph 3

-Subparagraph (a)(1)

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The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.

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- Definition

Amount of loss contingency liability.

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Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 450

-SubTopic 20

-Section 50

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The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.

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Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

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-Topic 230

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-Section 45

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-Subparagraph (c)

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- Definition

Minimum amount of purchase arrangement in which the entity has agreed to expend funds to procure goods or services from a supplier.

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No definition available.

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- Definition

Revenue earned during the period from non-repayable sum of money awarded to an entity to carry out a specific purpose as provided in grant agreements.

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-Publisher FASB

-Name Accounting Standards Codification

-Topic 225

-SubTopic 10

-Section S99

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-Subparagraph (SX 210.5-03.1(e))

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Commitments and Contingencies (Details) (USD $)	6 Months Ended
Commitments and Contingencies (Details) (USD $)	Mar. 31, 2015	Mar. 31, 2014	Sep. 30, 2014	Jan. 30, 2015
Schedule of Equity Method Investments [Line Items]
Purchase obligation	$ 29,800,000us-gaap_PurchaseObligation		$ 7,900,000us-gaap_PurchaseObligation
Price of an ion implanter	125,000	214,000
Revenue from Grants	4,100,000us-gaap_RevenueFromGrants
Grant revenue commitment to the project, by July 2014	6,100,000asys_GrantRevenueCommitmenttoProject
Kingstone Holding Company [Member]
Schedule of Equity Method Investments [Line Items]
Equity method investment, ownership percentage	55.00%
Kingstone Semiconductor Company Ltd [Member]
Schedule of Equity Method Investments [Line Items]
Percentage of voting interest of acquiree owned subsidiary	100.00%
Tempress Systems and Energy Research Centre Agreement [Member]
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter	1,400,000
Ownership rights to results of projects developed separately by individual parties	100.00%
R&D Agreement term	4 years
Required contribution in form of labor and assets	1,400,000
Number of years from agreement start for contribution for project support	2 years
Environmental Clean-up \| BTU International, Inc (BTU) Merger
Schedule of Equity Method Investments [Line Items]
Loss contingency accrual	100,000			200,000
Letter of credit	$ 200,000