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Long-term Debt (Details) (USD $)
In Millions, unless otherwise specified
Mar. 31, 2015
Jan. 30, 2015
Dec. 31, 2014
BTU International, Inc (BTU) Merger      
Debt Instrument [Line Items]      
Long-term debt acquired   $ 7.2us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt
/ us-gaap_BusinessAcquisitionAxis
= asys_BTUInternationalIncBTUMergerMember		  
Long-term debt 7.1us-gaap_LongTermDebt
/ us-gaap_BusinessAcquisitionAxis
= asys_BTUInternationalIncBTUMergerMember		    
Interest rate   4.40%us-gaap_DebtInstrumentInterestRateStatedPercentage
/ us-gaap_BusinessAcquisitionAxis
= asys_BTUInternationalIncBTUMergerMember		  
SoLayTec, B.V.      
Debt Instrument [Line Items]      
Long-term debt acquired     2.0us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesLongTermDebt
/ us-gaap_BusinessAcquisitionAxis
= asys_SoLayTecB.V.Member
Long-term debt $ 2.1us-gaap_LongTermDebt
/ us-gaap_BusinessAcquisitionAxis
= asys_SoLayTecB.V.Member		    
SoLayTec, B.V. | Minimum      
Debt Instrument [Line Items]      
Interest rate 5.95%us-gaap_DebtInstrumentInterestRateStatedPercentage
/ us-gaap_BusinessAcquisitionAxis
= asys_SoLayTecB.V.Member
/ us-gaap_RangeAxis
= us-gaap_MinimumMember		    
SoLayTec, B.V. | Maximum      
Debt Instrument [Line Items]      
Interest rate 10.00%us-gaap_DebtInstrumentInterestRateStatedPercentage
/ us-gaap_BusinessAcquisitionAxis
= asys_SoLayTecB.V.Member
/ us-gaap_RangeAxis
= us-gaap_MaximumMember