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Major Customers and Foreign Sales (Details)
6 Months Ended
Mar. 31, 2015
Customer
Mar. 31, 2014
Customer
Revenue, Major Customer [Line Items]    
Revenue, number of major customers 1asys_EntityWideRevenueMajorCustomerNumber 2asys_EntityWideRevenueMajorCustomerNumber
Revenues, percentage 100.00%asys_RevenuesPercentage 100.00%asys_RevenuesPercentage
United States    
Revenue, Major Customer [Line Items]    
Revenues, percentage 17.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_US
30.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_US
Other    
Revenue, Major Customer [Line Items]    
Revenues, percentage 3.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= asys_OtherNorthAmericaMember
0.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= asys_OtherNorthAmericaMember
Total North America    
Revenue, Major Customer [Line Items]    
Revenues, percentage 20.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= us-gaap_NorthAmericaMember
30.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= us-gaap_NorthAmericaMember
China    
Revenue, Major Customer [Line Items]    
Revenues, percentage 28.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_CN
15.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_CN
Taiwan    
Revenue, Major Customer [Line Items]    
Revenues, percentage 18.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_TW
17.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_TW
Other    
Revenue, Major Customer [Line Items]    
Revenues, percentage 16.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember
14.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember
Total Asia    
Revenue, Major Customer [Line Items]    
Revenues, percentage 62.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= us-gaap_AsiaMember
46.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= us-gaap_AsiaMember
Germany    
Revenue, Major Customer [Line Items]    
Revenues, percentage 8.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_DE
5.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= country_DE
Other    
Revenue, Major Customer [Line Items]    
Revenues, percentage 10.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember
19.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember
Total Europe    
Revenue, Major Customer [Line Items]    
Revenues, percentage 18.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= us-gaap_EuropeMember
24.00%asys_RevenuesPercentage
/ us-gaap_StatementGeographicalAxis
= us-gaap_EuropeMember
Customer Number One    
Revenue, Major Customer [Line Items]    
Concentration risk, percentage 19.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= asys_CustomerNumberOneMember
18.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= asys_CustomerNumberOneMember
Customer Number Two    
Revenue, Major Customer [Line Items]    
Concentration risk, percentage   16.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= asys_CustomerNumberTwoMember