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Basis of Presentation - Stock-Based Compensation (Details) (USD $)
In Thousands, except Share data, unless otherwise specified
3 Months Ended 6 Months Ended
Mar. 31, 2015
Mar. 31, 2014
Mar. 31, 2015
Mar. 31, 2014
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]        
Effect on income before income taxes $ (336)us-gaap_AllocatedShareBasedCompensationExpense [1] $ (197)us-gaap_AllocatedShareBasedCompensationExpense [1] $ (568)us-gaap_AllocatedShareBasedCompensationExpense [1] $ (373)us-gaap_AllocatedShareBasedCompensationExpense [1]
Effect on income taxes 58us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense 119us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense 95us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense 159us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense
Effect on net income $ (278)us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax $ (78)us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax $ (473)us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax $ (214)us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax
Restricted Stock [Member]        
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]        
Beginning Outstanding (in shares)     35,203us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
69,154us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
Released (in shares)     (21,663)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
(30,828)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
Ending Outstanding (in shares) 13,540us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
38,326us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
13,540us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
38,326us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Roll Forward]        
Beginning Outstanding, Weighted Average Grant Date Fair Value (usd per share)     $ 10.13us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
$ 10.13us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
Released, Weighted Average Grant Date Fair Value (usd per share)     $ 11.47us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
$ 10.08us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
Ending Outstanding, Weighted Average Grant Date Fair Value (usd per share) $ 7.98us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
$ 10.17us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
$ 7.98us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
$ 10.17us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockMember
Restricted Stock [Member] | Maximum        
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]        
Option vesting period (in years)     4 years  
Restricted Stock [Member] | Minimum        
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]        
Option vesting period (in years)     2 years  
Stock Options        
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]        
Outstanding at beginning of period (in shares)     1,063,324us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
1,059,417us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Granted (in shares)     327,500us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
220,406us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Assumed - merger (in shares)     367,229asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
0asys_SharebasedCompensationArrangementbySharebasedPaymentAwardOptionsAssumedInMerger
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Exercised (in shares)     (11,289)us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
(260,726)us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Forfeited (in shares)     (641)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
(3,464)us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Outstanding at end of period (in shares) 1,746,123us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
1,015,633us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
1,746,123us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
1,015,633us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Exercisable at end of period (in shares) 1,102,682us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
664,934us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
1,102,682us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
664,934us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Weighted average fair value of options granted during the period (usd per share)     $ 5.91us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 4.38us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Roll Forward]        
Outstanding at beginning of period, Weighted Average Exercise Price (usd per share)     $ 7.37us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 6.71us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Granted, Weighted Average Exercise Price (usd per share)     $ 9.74us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 7.01us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Assumed - Merger, Weighted Average Exercise Price (usd per share)     $ 14.19asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 0.00asys_SharebasedCompensationArrangementsbySharebasedPaymentAwardOptionsAssumedWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Exercised, Weighted Average Exercise Price (usd per share)     $ 4.91us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 4.28us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Forfeited, Weighted Average Exercise Price (usd per share)     $ 9.08us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 6.92us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Outstanding at end of period, Weighted Average Exercise Price (usd per share) $ 9.26us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 7.40us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 9.26us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 7.40us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Exercisable at end of period, Weighted Average Exercise Price (usd per share) $ 9.90us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 8.11us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 9.90us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 8.11us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]        
Risk free interest rate     2.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
2.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Expected life     6 years 6 years
Dividend rate     0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
0.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Volatility     67.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
69.00%us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate
/ us-gaap_AwardTypeAxis
= us-gaap_EmployeeStockOptionMember
Stock Options | Maximum        
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]        
Option expiration period (in years)     10 years  
Option vesting period (in years)     4 years  
Stock Options | Minimum        
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]        
Option vesting period (in years)     2 years  
[1] Stock-based compensation expense is included in selling, general and administrative expenses.