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Basis of Presentation - Intangibles (Details) (USD $)
6 Months Ended
Mar. 31, 2015
Sep. 30, 2014
Dec. 24, 2014
Jan. 30, 2015
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Gross Carrying Amount 9,175,000us-gaap_FiniteLivedIntangibleAssetsGross $ 6,112,000us-gaap_FiniteLivedIntangibleAssetsGross    
Accumulated Amortization (3,797,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization (3,434,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization    
Net Carrying Amount 5,378,000us-gaap_FiniteLivedIntangibleAssetsNet 2,678,000us-gaap_FiniteLivedIntangibleAssetsNet    
Non-compete agreements        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Gross Carrying Amount 1,032,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_NoncompeteAgreementsMember
1,055,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_NoncompeteAgreementsMember
   
Accumulated Amortization (1,032,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_NoncompeteAgreementsMember
(955,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_NoncompeteAgreementsMember
   
Net Carrying Amount 0us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_NoncompeteAgreementsMember
100,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_NoncompeteAgreementsMember
   
Non-compete agreements | Minimum        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Useful Life (in years) 4 years      
Non-compete agreements | Maximum        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Useful Life (in years) 8 years      
Customer lists        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Gross Carrying Amount 699,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_CustomerListsMember
817,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_CustomerListsMember
   
Accumulated Amortization (568,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_CustomerListsMember
(592,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_CustomerListsMember
   
Net Carrying Amount 131,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_CustomerListsMember
225,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_CustomerListsMember
   
Useful Life (in years) 10 years      
Technology        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Gross Carrying Amount 2,085,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_PatentedTechnologyMember
2,319,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_PatentedTechnologyMember
   
Accumulated Amortization (1,734,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_PatentedTechnologyMember
(1,682,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_PatentedTechnologyMember
   
Net Carrying Amount 351,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_PatentedTechnologyMember
637,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_PatentedTechnologyMember
   
Technology | Minimum        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Useful Life (in years) 5 years      
Technology | Maximum        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Useful Life (in years) 10 years      
In-process research and development        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Gross Carrying Amount 1,600,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_InProcessResearchAndDevelopmentMember
1,600,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_InProcessResearchAndDevelopmentMember
   
Accumulated Amortization (187,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_InProcessResearchAndDevelopmentMember
(27,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_InProcessResearchAndDevelopmentMember
   
Net Carrying Amount 1,413,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_InProcessResearchAndDevelopmentMember
1,573,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_InProcessResearchAndDevelopmentMember
   
Useful Life (in years) 5 years      
Trade names        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Gross Carrying Amount 1,330,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_TradeNamesMember
0us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_TradeNamesMember
   
Accumulated Amortization (18,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_TradeNamesMember
0us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_TradeNamesMember
   
Net Carrying Amount 1,312,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_TradeNamesMember
0us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_TradeNamesMember
   
Useful Life (in years) 15 years      
Other        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Gross Carrying Amount 2,429,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_OtherIntangibleAssetsMember
321,000us-gaap_FiniteLivedIntangibleAssetsGross
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_OtherIntangibleAssetsMember
   
Accumulated Amortization (258,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_OtherIntangibleAssetsMember
(178,000)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_OtherIntangibleAssetsMember
   
Net Carrying Amount 2,171,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_OtherIntangibleAssetsMember
143,000us-gaap_FiniteLivedIntangibleAssetsNet
/ us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis
= us-gaap_OtherIntangibleAssetsMember
   
Other | Minimum        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Useful Life (in years) 2 years      
Other | Maximum        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Useful Life (in years) 12 years      
SoLayTec, B.V.        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Percentage of voting interests acquired     51.00%us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired
/ us-gaap_BusinessAcquisitionAxis
= asys_SoLayTecB.V.Member
 
Intangible assets acquired     2,200,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles
/ us-gaap_BusinessAcquisitionAxis
= asys_SoLayTecB.V.Member
 
BTU International, Inc (BTU)        
Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]        
Intangible assets acquired       $ 0us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles
/ us-gaap_BusinessAcquisitionAxis
= asys_BTUInternationalIncBTUMember