Basis of Presentation - Goodwill (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
Dec. 31, 2014
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	$ 13,043us-gaap_GoodwillGross
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,720)
Goodwill, net, beginning of year	8,323us-gaap_Goodwill
Change in foreign exchange rates	(100)us-gaap_GoodwillTranslationAdjustments
Goodwill, gross, end of quarter	12,882us-gaap_GoodwillGross
Goodwill, impaired, accumulated impairment loss, end of quarter	(4,659)
Goodwill, net, end of quarter	8,223us-gaap_Goodwill
Solar and semiconductor equipment
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	12,315
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,720)
Goodwill, net, beginning of year	7,595
Change in foreign exchange rates	(100)
Goodwill, gross, end of quarter	12,154
Goodwill, impaired, accumulated impairment loss, end of quarter	(4,659)
Goodwill, net, end of quarter	7,495
Polishing supplies and equipment
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	728
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	728
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	728
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	$ 728

Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=14024403&loc=d3e13816-109267

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 45

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=6388280&loc=d3e13770-109266

+ Details

Name:	us-gaap_Goodwill
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (a,h)

-URI http://asc.fasb.org/extlink&oid=14024403&loc=d3e13816-109267

+ Details

Name:	us-gaap_GoodwillGross
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

+ Details

Name:	us-gaap_GoodwillImpairedAccumulatedImpairmentLoss
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Details

Name:	us-gaap_GoodwillRollForward
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of increase (decrease) from foreign currency translation adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (f)

-URI http://asc.fasb.org/extlink&oid=14024403&loc=d3e13816-109267

+ Details

Name:	us-gaap_GoodwillTranslationAdjustments
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Details

Name:	us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_StatementBusinessSegmentsAxis=asys_SolarAndSemiconductorEquipmentMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: