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Business Segments (Details) (USD $)
In Thousands, unless otherwise specified
3 Months Ended 12 Months Ended
Sep. 30, 2014
Jun. 30, 2014
Mar. 31, 2014
Dec. 31, 2013
Sep. 30, 2013
Jun. 30, 2013
Mar. 31, 2013
Dec. 31, 2012
Sep. 30, 2014
segment
Sep. 30, 2013
Sep. 30, 2012
Segment Reporting Information [Line Items]                      
Number of operating segments                 2    
Net revenue $ 19,822 $ 9,190 $ 12,717 $ 14,772 $ 6,925 $ 10,398 $ 8,118 $ 9,357 $ 56,501 $ 34,798 $ 81,539
Operating loss                 (13,089) (19,994) (32,984)
Capital expenditures                 462 178 1,306
Depreciation and amortization                 2,410 2,667 2,858
Identifiable assets 89,904       110,947       89,904 110,947  
Goodwill 8,323       8,481       8,323 8,481  
Solar and semiconductor equipment
                     
Segment Reporting Information [Line Items]                      
Net revenue                 45,848 26,368 73,102
Operating loss                 (10,159) (14,377) (26,236)
Capital expenditures                 392 98 1,121
Depreciation and amortization                 2,276 2,501 2,717
Identifiable assets 83,651       106,723       83,651 106,723  
Goodwill 7,595       7,753       7,595 7,753  
Polishing supplies and equipment
                     
Segment Reporting Information [Line Items]                      
Net revenue                 10,653 8,430 8,437
Operating loss                 2,805 1,282 1,405
Capital expenditures                 70 80 185
Depreciation and amortization                 134 166 141
Identifiable assets 6,253       4,224       6,253 4,224  
Goodwill 728       728       728 728  
Non-segment related loss
                     
Segment Reporting Information [Line Items]                      
Operating loss                 $ (5,735) $ (6,899) $ (8,153)