Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		9 Months Ended
	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014 segment	Jun. 30, 2013	Sep. 30, 2013
Segment Reporting Information [Line Items]
Number of business segments			2
Net Revenues	$ 9,190	$ 10,398	$ 36,678	$ 27,873
Operating Income (Loss)	(3,871)	(10,249)	(8,884)	(18,462)
Identifiable Assets	96,519		96,519		110,947
Solar and semiconductor equipment
Segment Reporting Information [Line Items]
Net Revenues	6,764	8,426	29,615	21,647
Operating Income (Loss)	(3,246)	(7,719)	(6,824)	(13,271)
Identifiable Assets	90,244		90,244		106,723
Polishing supplies and equipment
Segment Reporting Information [Line Items]
Net Revenues	2,426	1,972	7,063	6,226
Operating Income (Loss)	654	315	1,622	847
Identifiable Assets	6,275		6,275		4,224
Non-segment related
Segment Reporting Information [Line Items]
Operating Income (Loss)	$ (1,279)	$ (2,845)	$ (3,682)	$ (6,038)