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Business Segments (Details) (USD $)
In Thousands, unless otherwise specified
3 Months Ended 12 Months Ended
Sep. 30, 2013
Jun. 30, 2013
Mar. 31, 2013
Dec. 31, 2012
Sep. 30, 2012
Jun. 30, 2012
Mar. 31, 2012
Dec. 31, 2011
Sep. 30, 2013
segment
Sep. 30, 2012
Sep. 30, 2011
Segment Reporting Information [Line Items]                      
Number of operating segments                 2    
Net revenue $ 6,925 $ 10,398 $ 8,118 $ 9,357 $ 10,945 $ 24,300 $ 21,566 $ 24,728 $ 34,798 $ 81,539 $ 246,705
Operating loss                 (19,994) (32,984) 38,279
Capital expenditures                 178 1,306 5,183
Depreciation and amortization                 2,667 2,858 2,814
Identifiable assets 110,947       129,022       110,947 129,022  
Goodwill 8,481       8,355       8,481 8,355  
Solar and semiconductor equipment
                     
Segment Reporting Information [Line Items]                      
Net revenue                 26,368 73,102 233,804
Operating loss                 (14,377) (26,236) 46,712
Capital expenditures                 98 1,121 5,106
Depreciation and amortization                 2,501 2,717 2,589
Identifiable assets 106,723       123,923       106,723 123,923  
Goodwill 7,753       7,627       7,753 7,627  
Polishing supplies and equipment
                     
Segment Reporting Information [Line Items]                      
Net revenue                 8,430 8,437 12,901
Operating loss                 1,282 1,405 3,648
Capital expenditures                 80 185 77
Depreciation and amortization                 166 141 225
Identifiable assets 4,224       5,099       4,224 5,099  
Goodwill 728       728       728 728  
Non-segment related loss
                     
Segment Reporting Information [Line Items]                      
Operating loss                 $ (6,899) $ (8,153) $ (12,081)