Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		9 Months Ended
	Jun. 30, 2013	Jun. 30, 2012	Jun. 30, 2013 segment	Jun. 30, 2012	Sep. 30, 2012	Sep. 30, 2011
Segment Reporting Information [Line Items]
Number of business segments			2
Net Revenues:	$ 10,398	$ 24,300	$ 27,873	$ 70,594
Operating Income (Loss):	(10,249)	(5,250)	(18,462)	(13,079)
Identifiable Assets	103,455		103,455		129,022
Goodwill	8,384	13,006	8,384	13,006	8,355	13,313
Solar and semiconductor equipment [Member]
Segment Reporting Information [Line Items]
Net Revenues:	8,426	21,777	21,647	64,336
Operating Income (Loss):	(10,330)	(5,696)	(18,607)	(13,738)
Identifiable Assets	99,092		99,092		123,923
Goodwill	7,656		7,656		7,627
Polishing supplies and equipment [Member]
Segment Reporting Information [Line Items]
Net Revenues:	1,972	2,523	6,226	6,258
Operating Income (Loss):	81	446	145	659
Identifiable Assets	4,363		4,363		5,099
Goodwill	$ 728		$ 728		$ 728