Earnings Per Share (Tables)

9 Months Ended

Jun. 30, 2013

Earnings Per Share [Abstract]

Schedule of Earnings Per Share, Basic and Diluted

	Three Months Ended June 30,						Nine Months Ended June 30,
	2013			2012			2013			2012
	(in thousands, except per share amounts)						(in thousands, except per share amounts)
Basic Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(12,101	)	$	(2,965	)	$	(18,386	)	$	(8,920	)
Weighted Average Shares Outstanding:
Common stock	9,539			9,479			9,524			9,468
Basic loss per share attributable to Amtech shareholders	$	(1.27	)	$	(0.31	)	$	(1.93	)	$	(0.94	)
Diluted Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(12,101	)	$	(2,965	)	$	(18,386	)	$	(8,920	)
Weighted Average Shares Outstanding:
Common stock	9,539			9,479			9,524			9,468
Common stock equivalents (1)	—			—			—			—
Diluted shares	9,539			9,479			9,524			9,468
Diluted loss per share attributable to Amtech shareholders	$	(1.27	)	$	(0.31	)	$	(1.93	)	$	(0.94	)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.