Consolidated Statements of Operations (USD $) In Thousands, except Per Share data	12 Months Ended
	Sep. 30, 2011	Sep. 30, 2010	Sep. 30, 2009
Revenues, net of returns and allowances	$ 246,705	$ 120,019	$ 52,973
Cost of sales	156,048	77,307	37,954
Gross profit	90,657	42,712	15,019
Selling, general and administrative	43,739	24,075	14,766
Research and development	5,784	2,118	509
Impairment and restructuring charges	0	610	1,682
Expense related to reaquired shares	2,855	0	0
Operating income (loss)	38,279	15,909	(1,938)
Interest and other income (expense), net	30	(196)	(71)
Income (loss) before income taxes	38,309	15,713	(2,009)
Income tax provision (benefit)	16,190	6,150	(420)
Net income (loss)	22,119	9,563	(1,589)
Add: net loss attributable to noncontrolling interest	763	0	0
Net income (loss) attributable to Amtech Systems, Inc.	$ 22,882	$ 9,563	$ (1,589)
Income (Loss) Per Share:
Basic income (loss) per share attributable to Amtech shareholders (in dollars per share)	$ 2.41	$ 1.06	$ (0.18)
Weighted average shares outstanding (in shares)	9,480	9,022	9,019
Diluted income (loss) per share attributable to Amtech shareholders (in dollars per share)	$ 2.34	$ 1.04	$ (0.18)
Weighted average shares outstanding (in shares)	9,764	9,237	9,019