Condensed Consolidated Statements of Operations (USD $) In Thousands, except Per Share data	3 Months Ended		9 Months Ended
	Jun. 30, 2011	Jun. 30, 2010	Jun. 30, 2011	Jun. 30, 2010
Revenues, net of returns and allowances	$ 71,871	$ 43,072	$ 186,836	$ 74,606
Cost of sales	45,755	27,320	116,421	49,546
Gross profit	26,116	15,752	70,415	25,060
Selling, general and administrative	12,034	8,179	33,680	16,217
Impairment and resturcturing charges	0	610	0	610
Research and development	1,935	538	3,717	1,260
Operating income	12,147	6,425	33,018	6,973
Interest and other income (expense), net	73	(219)	118	(293)
Income before income taxes	12,220	6,206	33,136	6,680
Income tax provision	5,160	2,330	13,590	2,520
Net income	7,060	3,876	19,546	4,160
Add: Net Loss Attributable to noncontrolling interest	238	0	261	0
Net income attributable to Amtech Systems, Inc.	$ 7,298	$ 3,876	$ 19,807	$ 4,160
Earnings Per Share:
Basic income per share attributable to Amtech shareholders	$ 0.76	$ 0.43	$ 2.10	$ 0.46
Weighted average shares outstanding	9,576	9,021	9,446	9,004
Diluted income per share attributable to Amtech shareholders	$ 0.74	$ 0.42	$ 2.03	$ 0.45
Weighted average shares outstanding	9,852	9,231	9,754	9,184