REVENUE - Schedule of System Revenues of Primary Markets (Details) - Equipment and upgrade revenue - Revenue	3 Months Ended	6 Months Ended
Dec. 26, 2021	Dec. 27, 2020	Dec. 26, 2021	Dec. 27, 2020
Memory
Concentration Risk [Line Items]
Concentration by percent	58.00%	68.00%	61.00%	63.00%
Foundry
Concentration Risk [Line Items]
Concentration by percent	31.00%	26.00%	28.00%	31.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Concentration by percent	11.00%	6.00%	11.00%	6.00%

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
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Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
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Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef
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Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef
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