REVENUE - Schedule of System Revenues of Primary Markets (Details) - Revenue - Equipment and upgrade revenue	3 Months Ended
Sep. 26, 2021	Sep. 27, 2020
Memory
Concentration Risk [Line Items]
Concentration by percent	64.00%	58.00%
Foundry
Concentration Risk [Line Items]
Concentration by percent	25.00%	36.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Concentration by percent	11.00%	6.00%

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
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