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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 WaxLrZRNueSNJ8VWKFhGS6nKE8909cozRsfrd47CnXC8y74QYE2gHLZXmfTS7cRL
 5njBIVzthoYaOzMIFlK/zg==

<SEC-DOCUMENT>9999999997-02-028929.txt : 20020516
<SEC-HEADER>9999999997-02-028929.hdr.sgml : 20020516
<ACCEPTANCE-DATETIME>20020516092956
<PAPER>
ACCESSION NUMBER:		9999999997-02-028929
CONFORMED SUBMISSION TYPE:	ARS
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20011231
FILED AS OF DATE:		20020508

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			NANOMETRICS INC
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			CA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		ARS
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-13470
		FILM NUMBER:		02033461

	BUSINESS ADDRESS:	
		STREET 1:		310 DEGUIGNE DR
		CITY:			SUNNYVALE
		STATE:			CA
		ZIP:			94086
		BUSINESS PHONE:		4087461600

	MAIL ADDRESS:	
		STREET 1:		310 DEGUIGNE DRIVE
		CITY:			SUNNYVALE
		STATE:			CA
		ZIP:			94086
</SEC-HEADER>
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<TYPE>ARS
<SEQUENCE>1
<FILENAME>9999999997-02-028929.paper
<DESCRIPTION>AUTO-GENERATED PAPER DOCUMENT
<TEXT>
This document was generated as part of a paper submission.
Please reference the Document Control Number 02033461 for access to the original document.
</TEXT>
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