Share Repurchase Authorization	9 Months Ended
Oct. 01, 2022
Share Repurchase Program [Abstract]
Share Repurchase Authorization	NOTE 16. Share Repurchase Authorization In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows the Company to repurchase up to $100,000 worth of shares of its common stock. Repurchases may be made through both public market and private transactions from time to time with shares purchased being subsequently retired. During the three and nine month periods ended October 1, 2022, the Company purchased and retired 172 thousand shares of its common stock. The amount paid to repurchase the shares in excess of par value, including transaction costs, is recorded directly as a decrease to additional paid-in capital. At October 1, 2022, there was $88,465 available for future share repurchases under this share repurchase authorization.

Share Repurchase Authorization

9 Months Ended

Oct. 01, 2022

NOTE 16. Share Repurchase Authorization

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows the Company to repurchase up to $100,000 worth of shares of its common stock. Repurchases may be made through both public market and private transactions from time to time with shares purchased being subsequently retired. During the three and nine month periods ended October 1, 2022, the Company purchased and retired 172 thousand shares of its common stock. The amount paid to repurchase the shares in excess of par value, including transaction costs, is recorded directly as a decrease to additional paid-in capital. At October 1, 2022, there was $88,465 available for future share repurchases under this share repurchase authorization.