Share Repurchase Authorization	3 Months Ended
Apr. 02, 2022
Share Repurchase Program [Abstract]
Share Repurchase Authorization	NOTE 16. Share Repurchase Authorization In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows the Company to repurchase up to $100 million worth of shares of its common stock. Repurchases may be made through both public market and private transactions from time to time with shares purchased being subsequently retired. No shares were purchased in the three months ended April 2, 2022. At April 2, 2022, there was $100 million available for future share repurchases under this share repurchase authorization.

Share Repurchase Authorization

3 Months Ended

Apr. 02, 2022

NOTE 16. Share Repurchase Authorization

In November 2020, the Onto Innovation Board of Directors approved a share repurchase authorization, which allows the Company to repurchase up to $100 million worth of shares of its common stock. Repurchases may be made through both public market and private transactions from time to time with shares purchased being subsequently retired. No shares were purchased in the three months ended April 2, 2022. At April 2, 2022, there was $100 million available for future share repurchases under this share repurchase authorization.