<SEC-DOCUMENT>0001564590-22-012781-index.html : 20220331
<SEC-HEADER>0001564590-22-012781.hdr.sgml : 20220331
<ACCEPTANCE-DATETIME>20220331090322
ACCESSION NUMBER:		0001564590-22-012781
CONFORMED SUBMISSION TYPE:	DEFA14A
PUBLIC DOCUMENT COUNT:		3
FILED AS OF DATE:		20220331
DATE AS OF CHANGE:		20220331

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		DEFA14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		22789377

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEFA14A
<SEQUENCE>1
<FILENAME>onto-defa14a_20220510.htm
<DESCRIPTION>DEFA14A
<TEXT>
Document 1 - file: onto-defa14a_20220510.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>g4p4yeiow5a2000002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: g4p4yeiow5a2000002.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g4p4yeiow5a2000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: g4p4yeiow5a2000001.jpg

</DOCUMENT>
</SEC-DOCUMENT>