<SEC-DOCUMENT>0001564590-22-011212-index.html : 20220321 <SEC-HEADER>0001564590-22-011212.hdr.sgml : 20220321 <ACCEPTANCE-DATETIME>20220321165149 ACCESSION NUMBER: 0001564590-22-011212 CONFORMED SUBMISSION TYPE: 8-K PUBLIC DOCUMENT COUNT: 14 CONFORMED PERIOD OF REPORT: 20220321 ITEM INFORMATION: Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers FILED AS OF DATE: 20220321 DATE AS OF CHANGE: 20220321 FILER: COMPANY DATA: COMPANY CONFORMED NAME: ONTO INNOVATION INC. CENTRAL INDEX KEY: 0000704532 STANDARD INDUSTRIAL CLASSIFICATION: MEASURING & CONTROLLING DEVICES, NEC [3829] IRS NUMBER: 942276314 STATE OF INCORPORATION: DE FISCAL YEAR END: 1226 FILING VALUES: FORM TYPE: 8-K SEC ACT: 1934 Act SEC FILE NUMBER: 001-39110 FILM NUMBER: 22756181 BUSINESS ADDRESS: STREET 1: 16 JONSPIN ROAD CITY: WILMINGTON STATE: MA ZIP: 01887 BUSINESS PHONE: 9782536200 MAIL ADDRESS: STREET 1: 16 JONSPIN ROAD CITY: WILMINGTON STATE: MA ZIP: 01887 FORMER COMPANY: FORMER CONFORMED NAME: Onto Innovation Inc. DATE OF NAME CHANGE: 20191025 FORMER COMPANY: FORMER CONFORMED NAME: NANOMETRICS INC DATE OF NAME CHANGE: 19920703 </SEC-HEADER> <DOCUMENT> <TYPE>8-K <SEQUENCE>1 <FILENAME>onto-8k_20220321.htm <DESCRIPTION>8-K <TEXT> Document 1 - file: onto-8k_20220321.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-99.1 <SEQUENCE>2 <FILENAME>onto-ex991_6.htm <DESCRIPTION>EX-99.1 <TEXT> Document 2 - file: onto-ex991_6.htm
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>3 <FILENAME>ghocna5hqy2v000001.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 3 - file: ghocna5hqy2v000001.jpg
</DOCUMENT> <DOCUMENT> <TYPE>EX-101.SCH <SEQUENCE>4 <FILENAME>onto-20220321.xsd <DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA <TEXT> Document 4 - file: onto-20220321.xsd
</DOCUMENT> <DOCUMENT> <TYPE>EX-101.LAB <SEQUENCE>5 <FILENAME>onto-20220321_lab.xml <DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE <TEXT> Document 5 - file: onto-20220321_lab.xml
</DOCUMENT> <DOCUMENT> <TYPE>EX-101.PRE <SEQUENCE>6 <FILENAME>onto-20220321_pre.xml <DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE <TEXT> Document 6 - file: onto-20220321_pre.xml
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>7 <FILENAME>R1.htm <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 7 - file: R1.htm
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>8 <FILENAME>onto-8k_20220321_htm.xml <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 8 - file: onto-8k_20220321_htm.html
Document 8 - RAW XML: onto-8k_20220321_htm.xml
</DOCUMENT> <DOCUMENT> <TYPE>EXCEL <SEQUENCE>9 <FILENAME>Financial_Report.xlsx <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 9 - file: Financial_Report.xlsx
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>10 <FILENAME>Show.js <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 10 - file: Show.js
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>11 <FILENAME>report.css <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 11 - file: report.css
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>12 <FILENAME>FilingSummary.xml <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 12 - file: FilingSummary.html
Document 12 - RAW XML: FilingSummary.xml
</DOCUMENT> <DOCUMENT> <TYPE>JSON <SEQUENCE>14 <FILENAME>MetaLinks.json <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 14 - file: MetaLinks.json
</DOCUMENT> <DOCUMENT> <TYPE>ZIP <SEQUENCE>15 <FILENAME>0001564590-22-011212-xbrl.zip <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 15 - file: 0001564590-22-011212-xbrl.zip
</DOCUMENT> </SEC-DOCUMENT>