Business Combination - Allocation of the Intangible Assets (Details) - Rudolph Technologies, Inc. [Member] - USD ($) $ in Thousands	12 Months Ended
Jan. 01, 2022	Oct. 25, 2019
Business Acquisition [Line Items]
Estimated Fair Value	$ 374,900	$ 374,900
In-process research and development [Member]
Business Acquisition [Line Items]
Estimated Fair Value	$ 46,600
Weighted Average Useful Life (years)	indefinite
Developed technology [Member]
Business Acquisition [Line Items]
Estimated Fair Value	$ 260,500
Weighted Average Useful Life (years)	6 years 7 months 6 days
Customer relationships [Member]
Business Acquisition [Line Items]
Estimated Fair Value	$ 53,000
Weighted Average Useful Life (years)	13 years 1 month 6 days
Backlog [Member]
Business Acquisition [Line Items]
Estimated Fair Value	$ 6,700
Weighted Average Useful Life (years)	1 year 1 month 6 days
Trademarks and trade names [Member]
Business Acquisition [Line Items]
Estimated Fair Value	$ 8,100
Weighted Average Useful Life (years)	7 years 6 months

Acquired indefinite lived intangible assets weighted average useful life.

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- Definition

Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 350
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (a)(3)
-URI http://asc.fasb.org/extlink&oid=66006027&loc=d3e16265-109275

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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

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- Definition

Amount of intangible assets, excluding goodwill, acquired at the acquisition date.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 20
-Section 50
-Paragraph 1
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=123413009&loc=d3e4845-128472

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