Business Combination - Summary of Fair Values of Assets Acquired and Liabilities Assumed (Details) - USD ($) $ in Thousands	Jan. 01, 2022	Mar. 27, 2021	Dec. 26, 2020	Dec. 31, 2019	Oct. 25, 2019
Business Acquisition [Line Items]
Goodwill	$ 315,811		$ 306,632	$ 307,148
Inspectrology, LLC [Member]
Business Acquisition [Line Items]
Cash and cash equivalents		$ 220
Account receivables		4,071
Inventories		2,587
Prepaid expenses and other current assets		104
Property, plant and equipment		86
Identifiable intangible assets		10,290
Total assets acquired		17,358
Accounts payable		(1,048)
Payroll and related expenses		(512)
Deferred revenue		(386)
Other current liabilities		(576)
Net assets acquired		14,836
Goodwill		9,179
Total purchase consideration		$ 24,015
Rudolph Technologies, Inc. [Member]
Business Acquisition [Line Items]
Cash and cash equivalents					$ 43,882
Marketable securities					94,389
Account receivables					49,917
Inventories					98,478
Prepaid expenses and other current assets					6,659
Property, plant and equipment					77,451
Operating lease right-of-use assets					9,658
Identifiable intangible assets	$ 374,900				374,900
Deferred income taxes					2,191
Other assets					850
Total assets acquired					758,375
Accounts payable					(23,361)
Payroll and related expenses					(20,290)
Deferred revenue					(5,931)
Other current liabilities					(10,679)
Income taxes payable					(2,007)
Other non-current liabilities					(90,113)
Net assets acquired					605,994
Goodwill					284,137
Total purchase consideration					$ 890,131