Business acquisition, achieved earnout payment.

No definition available.

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- Definition

Business combination consideration transferred equity interests issued and issuable fair value.

+ References

No definition available.

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- Definition

Business combination potential earnout additional payment.

+ References

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- Definition

Business combination potential earnout subject to principal remaining period.

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No definition available.

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- Definition

Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

+ References

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- Definition

Amount of direct costs of the business combination including legal, accounting, and other costs incurred to consummate the business acquisition.

+ References

No definition available.

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- Definition

Value of equity interests (such as common shares, preferred shares, or partnership interest) issued or issuable to acquire the entity.

+ References

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- Definition

Number of shares of equity interests issued or issuable to acquire entity.

+ References

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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

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- Definition

Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

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- Definition

The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.

+ References

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Business Combination - Textual (Details) - USD ($) shares in Thousands, $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 27, 2021	Jan. 01, 2022	Dec. 26, 2020	Dec. 31, 2019
Inspectrology, LLC [Member]
Business Acquisition [Line Items]
Business acquisition, cash consideration	$ 24,015
Business acquisition, achieved earnout payment		$ 2,287
Inspectrology, LLC [Member] \| Maximum [Member]
Business Acquisition [Line Items]
Business combination potential earnout additional payment	$ 5,000
Business combination potential earnout subject to principal remaining period		3 years
Inspectrology, LLC [Member] \| Minimum [Member]
Business Acquisition [Line Items]
Business combination potential earnout subject to principal remaining period		1 year
Rudolph Technologies, Inc. [Member]
Business Acquisition [Line Items]
Business combination aggregate purchase price			$ 890,131
Rudolph Technologies, Inc. [Member] \| Developed technology [Member]
Business Acquisition [Line Items]
Estimated useful life		6 years 7 months 6 days
Rudolph Technologies, Inc. [Member] \| Customer relationships [Member]
Business Acquisition [Line Items]
Estimated useful life		13 years 1 month 6 days
Rudolph Technologies, Inc. [Member] \| Backlog [Member]
Business Acquisition [Line Items]
Estimated useful life		1 year 1 month 6 days
Rudolph Technologies, Inc. [Member] \| Trademarks and trade names [Member]
Business Acquisition [Line Items]
Estimated useful life		7 years 6 months
Rudolph Technologies, Inc. [Member] \| Common Stock [Member]
Business Acquisition [Line Items]
Business combination equity interests issued or issuable			$ 884,801
Business combination common stock shares issued			25,060
Rudolph Technologies, Inc. [Member] \| Nanometrics Equity Awards [Member]
Business Acquisition [Line Items]
Business combination fair value of assumed equity awards included in aggregate purchase			$ 5,330
Rudolph Technologies, Inc. [Member] \| General and Administrative Expense [Member]
Business Acquisition [Line Items]
Business acquisition, related costs				$ 9,907