<SEC-DOCUMENT>0001564590-21-058668-index.html : 20211129
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<ACCEPTANCE-DATETIME>20211129161504
ACCESSION NUMBER:		0001564590-21-058668
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		12
CONFORMED PERIOD OF REPORT:	20211123
ITEM INFORMATION:		Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers
FILED AS OF DATE:		20211129
DATE AS OF CHANGE:		20211129

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		211456310

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
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Document 1 - file: onto-8k_20211123.htm

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<TYPE>EX-101.SCH
<SEQUENCE>2
<FILENAME>onto-20211123.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
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Document 2 - file: onto-20211123.xsd

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<DOCUMENT>
<TYPE>EX-101.LAB
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<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
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Document 3 - file: onto-20211123_lab.xml

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<FILENAME>onto-20211123_pre.xml
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Document 4 - file: onto-20211123_pre.xml

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<FILENAME>onto-8k_20211123_htm.xml
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Document 5 - RAW XML: onto-8k_20211123_htm.xml

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<FILENAME>R1.htm
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<TEXT>
Document 6 - file: R1.htm

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<TYPE>EXCEL
<SEQUENCE>7
<FILENAME>Financial_Report.xlsx
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<TEXT>
Document 7 - file: Financial_Report.xlsx

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<SEQUENCE>8
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Document 8 - file: Show.js

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<SEQUENCE>9
<FILENAME>report.css
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Document 9 - file: report.css

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<SEQUENCE>10
<FILENAME>FilingSummary.xml
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Document 10 - file: FilingSummary.html

Document 10 - RAW XML: FilingSummary.xml

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<TYPE>JSON
<SEQUENCE>12
<FILENAME>MetaLinks.json
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<TEXT>
Document 12 - file: MetaLinks.json

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<TYPE>ZIP
<SEQUENCE>13
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Document 13 - file: 0001564590-21-058668-xbrl.zip

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