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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-022055
Filing Date
2021-04-29
Accepted
2021-04-29 17:13:45
Documents
89
Period of Report
2021-03-27

Document Format Files

Seq Description Document Type Size
1 10-Q onto-10q_20210327.htm   iXBRL 10-Q 2403673
2 EX-31.1 onto-ex311_6.htm EX-31.1 38189
3 EX-31.2 onto-ex312_9.htm EX-31.2 38084
4 EX-32.1 onto-ex321_7.htm EX-32.1 10027
5 EX-32.2 onto-ex322_8.htm EX-32.2 10331
  Complete submission text file 0001564590-21-022055.txt   10220182

Data Files

Seq Description Document Type Size
6 XBRL TAXONOMY EXTENSION SCHEMA onto-20210327.xsd EX-101.SCH 54010
7 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE onto-20210327_cal.xml EX-101.CAL 79849
8 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE onto-20210327_def.xml EX-101.DEF 130840
9 XBRL TAXONOMY EXTENSION LABEL LINKBASE onto-20210327_lab.xml EX-101.LAB 405282
10 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE onto-20210327_pre.xml EX-101.PRE 310518
11 EXTRACTED XBRL INSTANCE DOCUMENT onto-10q_20210327_htm.xml XML 2495387
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

IRS No.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 21872022
SIC: 3829 Measuring & Controlling Devices, NEC