Business Combination - Textual (Details) - USD ($) $ in Thousands	3 Months Ended	9 Months Ended
Sep. 26, 2020	Sep. 26, 2020
Business Acquisition [Line Items]
Aggregate adjustments to estimated fair values of assets acquired and liabilities		$ 478
Other Non-current Liabilities [Member] \| Rudolph and Nanometrics [Member]
Business Acquisition [Line Items]
Aggregate adjustments to estimated fair values of assets acquired and liabilities	$ 0	$ 478

Amount of increase (decrease) from adjustments after acquisition date under purchase accounting of an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 10
-Section 25
-Paragraph 16
-URI http://asc.fasb.org/extlink&oid=116868678&loc=d3e961-128460

Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 350
-SubTopic 20
-Section 50
-Paragraph 1
-Subparagraph (g)
-URI http://asc.fasb.org/extlink&oid=121556970&loc=d3e13816-109267

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration