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Business Combination - Summary of Preliminary Allocation of the Total Purchase Consideration to Initial Estimated Fair Values of the Assets Acquired and Liabilities Assumed (Details) - USD ($)
$ in Thousands
Jun. 27, 2020
Dec. 31, 2019
Oct. 25, 2019
Business Acquisition [Line Items]      
Goodwill $ 307,626 $ 307,148  
Rudolph Technologies, Inc. [Member]      
Business Acquisition [Line Items]      
Cash and cash equivalents     $ 43,882
Marketable securities     94,389
Account receivables     49,917
Inventories     98,478
Prepaid expenses and other current assets     7,734
Property, plant and equipment     77,451
Operating lease right-of-use assets     9,658
Identifiable intangible assets     374,900
Deferred income taxes     1,352
Other assets     850
Total assets acquired     758,611
Accounts payable     (23,361)
Payroll and related expenses     (20,290)
Deferred revenue     (5,931)
Other current liabilities     (10,739)
Income taxes payable     (2,699)
Other non-current liabilities     (90,591)
Net assets acquired     605,000
Goodwill     285,131
Total purchase consideration     $ 890,131