<SEC-DOCUMENT>0001564590-20-026089-index.html : 20200519
<SEC-HEADER>0001564590-20-026089.hdr.sgml : 20200519
<ACCEPTANCE-DATETIME>20200519112728
ACCESSION NUMBER:		0001564590-20-026089
CONFORMED SUBMISSION TYPE:	S-8
PUBLIC DOCUMENT COUNT:		6
FILED AS OF DATE:		20200519
DATE AS OF CHANGE:		20200519
EFFECTIVENESS DATE:		20200519

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	FILING VALUES:
		FORM TYPE:		S-8
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-238492
		FILM NUMBER:		20892439

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8
<SEQUENCE>1
<FILENAME>onto-s8.htm
<DESCRIPTION>S-8
<TEXT>
Document 1 - file: onto-s8.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>2
<FILENAME>onto-ex51_7.htm
<DESCRIPTION>EX-5.1
<TEXT>
Document 2 - file: onto-ex51_7.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.2
<SEQUENCE>3
<FILENAME>onto-ex102_23.htm
<DESCRIPTION>EX-10.2
<TEXT>
Document 3 - file: onto-ex102_23.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>4
<FILENAME>onto-ex231_22.htm
<DESCRIPTION>EX-23.1
<TEXT>
Document 4 - file: onto-ex231_22.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>gxuekexknyov000002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: gxuekexknyov000002.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>gxuekexknyov000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: gxuekexknyov000001.jpg

</DOCUMENT>
</SEC-DOCUMENT>