<SEC-DOCUMENT>0001564590-20-025340-index.html : 20200514
<SEC-HEADER>0001564590-20-025340.hdr.sgml : 20200514
<ACCEPTANCE-DATETIME>20200514120847
ACCESSION NUMBER:		0001564590-20-025340
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		24
CONFORMED PERIOD OF REPORT:	20200512
ITEM INFORMATION:		Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers
ITEM INFORMATION:		Submission of Matters to a Vote of Security Holders
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20200514
DATE AS OF CHANGE:		20200514

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		20876452

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
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<TYPE>8-K
<SEQUENCE>1
<FILENAME>onto-8k_20200512.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: onto-8k_20200512.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-10.1 <SEQUENCE>2 <FILENAME>onto-ex101_59.htm <DESCRIPTION>EX-10.1 <TEXT> Document 2 - file: onto-ex101_59.htm
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</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>5 <FILENAME>gwartebyqv0l000009.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 5 - file: gwartebyqv0l000009.jpg
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</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>9 <FILENAME>gwartebyqv0l000006.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 9 - file: gwartebyqv0l000006.jpg
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</DOCUMENT> <DOCUMENT> <TYPE>EX-101.SCH <SEQUENCE>14 <FILENAME>onto-20200512.xsd <DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA <TEXT> Document 14 - file: onto-20200512.xsd
</DOCUMENT> <DOCUMENT> <TYPE>EX-101.LAB <SEQUENCE>15 <FILENAME>onto-20200512_lab.xml <DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE <TEXT> Document 15 - file: onto-20200512_lab.xml
</DOCUMENT> <DOCUMENT> <TYPE>EX-101.PRE <SEQUENCE>16 <FILENAME>onto-20200512_pre.xml <DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE <TEXT> Document 16 - file: onto-20200512_pre.xml
</DOCUMENT> <DOCUMENT> <TYPE>JSON <SEQUENCE>17 <FILENAME>MetaLinks.json <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 17 - file: MetaLinks.json
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</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>22 <FILENAME>onto-8k_20200512_htm.xml <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 22 - file: onto-8k_20200512_htm.html
Document 22 - RAW XML: onto-8k_20200512_htm.xml
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Document 24 - RAW XML: FilingSummary.xml
</DOCUMENT> <DOCUMENT> <TYPE>EXCEL <SEQUENCE>25 <FILENAME>Financial_Report.xlsx <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 25 - file: Financial_Report.xlsx
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