Business Combination - Summary of Preliminary Allocation of the Total Purchase Consideration to Initial Estimated Fair Values of the Assets Acquired and Liabilities Assumed (Details) - USD ($) $ in Thousands	Mar. 28, 2020	Dec. 31, 2019	Oct. 25, 2019
Business Acquisition [Line Items]
Goodwill	$ 307,626	$ 307,148
Rudolph Technologies, Inc. [Member]
Business Acquisition [Line Items]
Cash and cash equivalents			$ 43,882
Marketable securities			94,389
Account receivables			49,917
Inventories			98,478
Prepaid expenses and other current assets			7,734
Property, plant and equipment			77,451
Operating lease right-of-use assets			9,658
Identifiable intangible assets			374,900
Deferred income taxes			1,352
Other assets			850
Total assets acquired			758,611
Accounts payable			(23,361)
Payroll and related expenses			(20,290)
Deferred revenue			(5,931)
Other current liabilities			(10,739)
Income taxes payable			(2,699)
Other non-current liabilities			(90,591)
Net assets acquired			605,000
Goodwill			285,131
Total purchase consideration			$ 890,131