<SEC-DOCUMENT>0001564590-20-015302-index.html : 20200403
<SEC-HEADER>0001564590-20-015302.hdr.sgml : 20200403
<ACCEPTANCE-DATETIME>20200403171347
ACCESSION NUMBER:		0001564590-20-015302
CONFORMED SUBMISSION TYPE:	DEFA14A
PUBLIC DOCUMENT COUNT:		3
FILED AS OF DATE:		20200403
DATE AS OF CHANGE:		20200403
EFFECTIVENESS DATE:		20200403

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	FILING VALUES:
		FORM TYPE:		DEFA14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		20774551

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEFA14A
<SEQUENCE>1
<FILENAME>onto-defa14a_20200512.htm
<DESCRIPTION>DEFA14A
<TEXT>
Document 1 - file: onto-defa14a_20200512.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>gov5p2v1lz4j000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: gov5p2v1lz4j000001.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>gov5p2v1lz4j000002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: gov5p2v1lz4j000002.jpg

</DOCUMENT>
</SEC-DOCUMENT>