Business Combination - Summary of Preliminary Allocation of the Total Purchase Consideration to Initial Estimated Fair Values of the Assets Acquired and Liabilities Assumed (Details) - USD ($) $ in Thousands	Dec. 31, 2019	Oct. 25, 2019	Dec. 31, 2018	Dec. 31, 2017
Business Acquisition [Line Items]
Goodwill	$ 307,148		$ 22,495	$ 22,495
Rudolph Technologies, Inc. [Member]
Business Acquisition [Line Items]
Cash and cash equivalents		$ 43,882
Marketable securities		94,389
Account receivables		49,917
Inventories		98,478
Prepaid expenses and other current assets		7,734
Property, plant and equipment		77,451
Operating lease right-of-use assets		9,658
Identifiable intangible assets	$ 374,900	374,900
Deferred income taxes		1,352
Other assets		850
Total assets acquired		758,611
Accounts payable		(23,361)
Payroll and related expenses		(20,290)
Deferred revenue		(5,931)
Other current liabilities		(10,739)
Income taxes payable		(2,699)
Other non-current liabilities		(90,113)
Net assets acquired		605,478
Goodwill		284,653
Total purchase consideration		$ 890,131