Business combination consideration transferred equity interests issued and issuable fair value.

No definition available.

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- Definition

Business combination step acquisition step up of inventory to fair value.

+ References

No definition available.

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- Definition

Common stock conversion ratio.

+ References

No definition available.

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- Definition

Weighted average amortization period of finite-lived intangible assets acquired either individually or as part of a group of assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

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-Topic 350
-SubTopic 30
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- Definition

Amount of direct costs of the business combination including legal, accounting, and other costs incurred to consummate the business acquisition.

+ References

No definition available.

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- Definition

Value of equity interests (such as common shares, preferred shares, or partnership interest) issued or issuable to acquire the entity.

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- Definition

Number of shares of equity interests issued or issuable to acquire entity.

+ References

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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

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- Definition

Price of a single share of a number of saleable stocks paid or offered to be paid in a business combination.

+ References

No definition available.

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- Definition

For receivables acquired in a business combination, excluding certain loans and debt securities acquired in a transfer (as defined), this element represents the best estimate at the acquisition date of the contractual cash flows not expected to be collected, by major class of receivable, such as loans, direct finance leases (as defined), and any other class of receivables.

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- Definition

Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

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- Definition

Face amount or stated value per share of common stock.

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- Definition

The equity interest of noncontrolling shareholders, partners or other equity holders in consolidated entity.

+ References

No definition available.

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- Definition

The net result for the period of deducting operating expenses from operating revenues.

+ References

No definition available.

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Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.

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Business Combination - Textual (Details) $ / shares in Units, shares in Thousands, $ in Thousands		3 Months Ended								12 Months Ended
	Oct. 25, 2019 $ / shares	Dec. 31, 2019 USD ($) $ / shares	Sep. 30, 2019 USD ($)	Jun. 30, 2019 USD ($)	Mar. 31, 2019 USD ($)	Dec. 31, 2018 USD ($) $ / shares	Sep. 30, 2018 USD ($)	Jun. 30, 2018 USD ($)	Mar. 31, 2018 USD ($)	Dec. 31, 2019 USD ($) $ / shares shares	Dec. 31, 2018 USD ($) $ / shares	Dec. 31, 2017 USD ($)
Business Acquisition [Line Items]
Common stock, par value \| $ / shares		$ 0.001				$ 0.001				$ 0.001	$ 0.001
Net sales		$ 120,558	$ 62,935	$ 61,511	$ 60,892	$ 62,780	$ 60,432	$ 77,476	$ 73,096	$ 305,896	$ 273,784	$ 255,098
Operating loss										5,043	$ (51,084)	(59,288)
Rudolph Technologies, Inc. [Member]
Business Acquisition [Line Items]
Common stock, par value \| $ / shares	$ 0.001
Common stock conversion ratio	0.8042
Business acquisition, related costs												$ 37,900
Business combination aggregate purchase price										890,131
Account receivable not expected to be collected		200								200
Step-up of inventory to fair value as of merger date										26,486
Net sales										66,261
Operating loss										$ 7,065
Rudolph Technologies, Inc. [Member] \| Developed technology [Member]
Business Acquisition [Line Items]
Estimated useful life										6 years 7 months 6 days
Rudolph Technologies, Inc. [Member] \| Customer relationships [Member]
Business Acquisition [Line Items]
Estimated useful life										13 years 1 month 6 days
Rudolph Technologies, Inc. [Member] \| Backlog [Member]
Business Acquisition [Line Items]
Estimated useful life										1 year 1 month 6 days
Rudolph Technologies, Inc. [Member] \| Trademarks and trade names [Member]
Business Acquisition [Line Items]
Estimated useful life										7 years 6 months
Rudolph Technologies, Inc. [Member] \| Nanometrics Equity Awards [Member]
Business Acquisition [Line Items]
Business combination fair value of assumed equity awards included in aggregate purchase										$ 5,330
Rudolph Technologies, Inc. [Member] \| General and Administrative Expense [Member]
Business Acquisition [Line Items]
Business acquisition, related costs		9,907								9,907
Rudolph Technologies, Inc. [Member] \| Common Stock [Member]
Business Acquisition [Line Items]
Closing price of shares \| $ / shares	$ 28.50
Business combination equity interests issued or issuable		$ 884,801								$ 884,801
Business combination common stock shares issued \| shares										25,060
Rudolph Technologies, Inc. [Member] \| Combined Entity [Member]
Business Acquisition [Line Items]
Ownership percentage	50.00%
Parent Company [Member] \| Combined Entity [Member]
Business Acquisition [Line Items]
Ownership percentage	50.00%