Summary of Significant Accounting Policies - Textual (Details)	3 Months Ended	12 Months Ended
	Dec. 31, 2019 USD ($)	Dec. 31, 2019 USD ($) Segment	Dec. 31, 2018 USD ($)	Dec. 31, 2017 USD ($)	Oct. 25, 2019 USD ($)	Jan. 01, 2019 USD ($)
Summary Of Significant Accounting Policies [Line Items]
Cost of revenues for excess and obsolete inventories	$ 5,945,000	$ 10,841,000	$ 3,042,000	$ 3,833,000
Property plant and equipment method		straight-line method
Impairment of long-lived assets			0	0
Number of operating segments | Segment		1
Goodwill impairment		$ 0	0	0
Accumulated exchange losses resulting from translation of foreign operation	564,000	564,000	1,273,000
Derivative instruments, (loss) gain recognized in income, net		343,000	(81,000)	105,000
Aggregate notional amounts	38,887,000	38,887,000	6,746,000
Operating lease assets	23,588,000	23,588,000
Operating lease obligations	24,876,000	24,876,000
Rudolph Technologies, Inc. [Member]
Summary Of Significant Accounting Policies [Line Items]
Operating lease assets assumed					$ 9,658,000
Topic 842 [Member]
Summary Of Significant Accounting Policies [Line Items]
Operating lease assets						$ 14,426,000
Operating lease obligations						14,426,000
Topic 842 [Member] | Rudolph Technologies, Inc. [Member]
Summary Of Significant Accounting Policies [Line Items]
Operating lease assets assumed						9,658,000
Operating lease obligations assumed						$ 9,658,000
Forward Contracts Matured [Member]
Summary Of Significant Accounting Policies [Line Items]
Aggregate notional amounts	$ 58,522,000	58,522,000	$ 8,465,000	$ 9,582,000
General and Administrative Expense [Member]
Summary Of Significant Accounting Policies [Line Items]
Impairment of long-lived assets		$ 507,000
Computer Equipment [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		3 years
Minimum [Member] | Building [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		5 years
Minimum [Member] | Machinery and equipment [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		3 years
Minimum [Member] | Furniture and fixtures [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		3 years
Minimum [Member] | Software [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		3 years
Maximum [Member] | Building [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		22 years
Maximum [Member] | Machinery and equipment [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		10 years
Maximum [Member] | Furniture and fixtures [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		10 years
Maximum [Member] | Software [Member]
Summary Of Significant Accounting Policies [Line Items]
Estimated useful lives of depreciable assets		7 years
Systems Revenue [Member]
Summary Of Significant Accounting Policies [Line Items]
Number of days for payment due from customer		30 days
Systems Revenue [Member] | Minimum [Member]
Summary Of Significant Accounting Policies [Line Items]
Percentage of invoice amount due		80.00%
Assurance warranty period against defects		12 months
Systems Revenue [Member] | Maximum [Member]
Summary Of Significant Accounting Policies [Line Items]
Percentage of invoice amount due		90.00%
Assurance warranty period against defects		14 months
Software Revenue [Member]
Summary Of Significant Accounting Policies [Line Items]
Number of days for payment due from customer		30 days
Parts Revenue [Member]
Summary Of Significant Accounting Policies [Line Items]
Number of days for payment due from customer		30 days
Service Revenue [Member]
Summary Of Significant Accounting Policies [Line Items]
Number of days for payment due from customer		30 days