Subsequent Events - Textual (Details)	Oct. 25, 2019 $ / shares	Sep. 28, 2019 $ / shares	Dec. 29, 2018 $ / shares
Subsequent Event [Line Items]
Common stock, par value		$ 0.001	$ 0.001
Subsequent Event [Member] | Rudolph Technologies, Inc. [Member]
Subsequent Event [Line Items]
Common stock, par value	$ 0.001
Common stock conversion ratio	0.8042
Subsequent Event [Member] | Rudolph Technologies, Inc. [Member] | Combined Entity [Member]
Subsequent Event [Line Items]
Ownership percentage	50.00%
Subsequent Event [Member] | Parent Company [Member] | Combined Entity [Member]
Subsequent Event [Line Items]
Ownership percentage	50.00%