Name:	onto_ScheduleOfShareBasedCompensationArrangementByShareBasedPaymentAwardPercentOfGrantedSharesToVestIfTargetIsAchieved
Namespace Prefix:	onto_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

Schedule of share-based compensation arrangement by share-based payment award, Percent of maximum granted shares to vest if maximum stock price performance is achieved.

No definition available.

Name:	onto_ScheduleOfShareBasedCompensationArrangementByShareBasedPaymentAwardPercentOfMaximumGrantedSharesToVestIfMaximumStockPricePerformanceIsAchieved
Namespace Prefix:	onto_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

Share based compensation arrangements by share based payment award options share closing price.

No definition available.

Name:	onto_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsShareClosingPrice
Namespace Prefix:	onto_
Data Type:	num:perShareItemType
Balance Type:	na
Period Type:	instant

Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (a)(1)
-URI http://asc.fasb.org/extlink&oid=116856206&loc=d3e5070-113901

Name:	us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

No definition available.

Name:	us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Gross number of share options (or share units) granted during the period.

No definition available.

Name:	us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross
Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

Name:	us-gaap_AwardTypeAxis=us-gaap_PerformanceSharesMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Name:	us-gaap_VestingAxis=us-gaap_ShareBasedCompensationAwardTrancheOneMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Name:	us-gaap_VestingAxis=us-gaap_ShareBasedCompensationAwardTrancheTwoMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: