Commitments and Contingencies - Textual (Details)		9 Months Ended
	Oct. 25, 2019 $ / shares	Sep. 28, 2019 USD ($) Complaint $ / shares	Dec. 29, 2018 USD ($) $ / shares
Commitments And Contingencies [Line Items]
Common stock, par value | $ / shares		$ 0.001	$ 0.001
Liabilities recorded for obligations | $		$ 0	$ 0
Number of complaints filed		5
Number of defendants		1
United States District Court for District of Delaware [Member]
Commitments And Contingencies [Line Items]
Number of complaints filed		3
United States District Court for District of New Jersey [Member]
Commitments And Contingencies [Line Items]
Number of complaints filed		1
United States District Court for District of Massachusetts [Member]
Commitments And Contingencies [Line Items]
Number of complaints filed		1
Rudolph Technologies, Inc. [Member]
Commitments And Contingencies [Line Items]
Number of complaints filed		2
Rudolph and Directors [Member]
Commitments And Contingencies [Line Items]
Number of complaints filed		3
Subsequent Event [Member] | Parent Company [Member] | Combined Entity [Member]
Commitments And Contingencies [Line Items]
Ownership percentage	50.00%
Subsequent Event [Member] | Rudolph Technologies, Inc. [Member]
Commitments And Contingencies [Line Items]
Common stock, par value | $ / shares	$ 0.001
Common stock conversion ratio	0.8042
Subsequent Event [Member] | Rudolph Technologies, Inc. [Member] | Combined Entity [Member]
Commitments And Contingencies [Line Items]
Ownership percentage	50.00%