Commitments and Contingencies - Textual (Details)	Jun. 23, 2019 $ / shares	Jun. 29, 2019 USD ($) $ / shares	Dec. 29, 2018 USD ($) $ / shares
Commitments And Contingencies [Line Items]
Common stock, par value		$ 0.001	$ 0.001
Liabilities recorded for obligations | $		$ 0	$ 0
Parent Company [Member] | Combined Entity [Member]
Commitments And Contingencies [Line Items]
Ownership percentage	50.00%
Rudolph Technologies, Inc. [Member]
Commitments And Contingencies [Line Items]
Common stock, par value	$ 0.001
Common stock conversion ratio	0.8042
Rudolph Technologies, Inc. [Member] | Combined Entity [Member]
Commitments And Contingencies [Line Items]
Ownership percentage	50.00%