<SEC-DOCUMENT>0001564590-17-005962-index.html : 20170404
<SEC-HEADER>0001564590-17-005962.hdr.sgml : 20170404
<ACCEPTANCE-DATETIME>20170403214420
ACCESSION NUMBER:		0001564590-17-005962
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		3
CONFORMED PERIOD OF REPORT:	20170523
FILED AS OF DATE:		20170404
DATE AS OF CHANGE:		20170403
EFFECTIVENESS DATE:		20170404

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			NANOMETRICS INC
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1227

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-13470
		FILM NUMBER:		17736081

	BUSINESS ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
		BUSINESS PHONE:		408-435-9600

	MAIL ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>nano-def14a_20170523.htm
<DESCRIPTION>NANO-DEF14A-2016
<TEXT>
Document 1 - file: nano-def14a_20170523.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>g20170404014042738951.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: g20170404014042738951.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g20170404014042709950.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: g20170404014042709950.jpg

</DOCUMENT>
</SEC-DOCUMENT>