Commitments and Contingencies - Textual (Details) - USD ($)	12 Months Ended
	Dec. 31, 2016	Dec. 26, 2015	Dec. 27, 2014
Long Term Purchase Commitment [Line Items]
Liabilities recorded for obligations	$ 0	$ 0
Rent expense	1,800,000	1,700,000	$ 2,000,000
Zygo Corporation [Member]
Long Term Purchase Commitment [Line Items]
Payments for royalty	300,000	$ 900,000
Inventories [Member]
Long Term Purchase Commitment [Line Items]
Purchase commitment	$ 30,600,000