Fair Value Measurements and Disclosures - Unobservable Input Reconciliation (Details) - Level 3 [Member] - USD ($) $ in Thousands	12 Months Ended
Dec. 31, 2016	Dec. 26, 2015
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]
Fair value, beginning balance	$ 1,490	$ 2,397
Change in fair value included in earnings	(1,175)	(56)
Fair Value, ending balance		1,490
Zygo Corporation [Member]
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]
Payments made to Zygo Corporation	$ (315)	$ (851)

A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.

No definition available.

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- Definition

Amount of gain (loss) recognized on the income statement for financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 820
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)(1)
-URI http://asc.fasb.org/extlink&oid=66048111&loc=d3e19207-110258

+ Details

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- Definition

Amount of settlements of financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 820
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)(2)
-URI http://asc.fasb.org/extlink&oid=66048111&loc=d3e19207-110258

+ Details

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- Definition

Fair value of financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 820
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=66048111&loc=d3e19207-110258

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