Defined Benefit Pension Plan

12 Months Ended

Dec. 31, 2016

Compensation And Retirement Disclosure [Abstract]

Defined Benefit Pension Plan

Note 14. Defined Benefit Pension Plan

Nanometrics sponsors a statutory government mandated defined benefit pension plan (the “Benefit Plan”) in Taiwan for its local employees. The fair value of plan assets was $0.2 million for each of the fiscal years ended 2016, 2015 and 2014, respectively; and the net funding deficiency of the Benefit Plan was $0.4 million, $0.3 million, and $0.3 million for the fiscal years ended December 31, 2016, December 26, 2015, and December 27, 2014, respectively. Based on the nature and limited extent of the pension plan, we determined this pension plan was not material for separate disclosure.