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Fair Value Measurements and Disclosures - Unobservable Input Reconciliation (Details) - Level 3 [Member]
$ in Thousands
9 Months Ended
Sep. 24, 2016
USD ($)
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]  
Fair value, beginning balance $ 1,490
Change in fair value included in earnings 158
Fair Value, ending balance 1,333
Zygo Corporation [Member]  
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]  
Payments made to Zygo Corporation $ (315)