<SEC-DOCUMENT>0001564590-16-024661-index.html : 20160824
<SEC-HEADER>0001564590-16-024661.hdr.sgml : 20160824
<ACCEPTANCE-DATETIME>20160824160219
ACCESSION NUMBER:		0001564590-16-024661
CONFORMED SUBMISSION TYPE:	S-8
PUBLIC DOCUMENT COUNT:		4
FILED AS OF DATE:		20160824
DATE AS OF CHANGE:		20160824
EFFECTIVENESS DATE:		20160824

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			NANOMETRICS INC
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1227

	FILING VALUES:
		FORM TYPE:		S-8
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-213277
		FILM NUMBER:		161849381

	BUSINESS ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
		BUSINESS PHONE:		408-435-9600

	MAIL ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8
<SEQUENCE>1
<FILENAME>nano-s8_20160727.htm
<DESCRIPTION>NANO-2016-07-27-S-8
<TEXT>
Document 1 - file: nano-s8_20160727.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>2
<FILENAME>nano-ex51_10.htm
<DESCRIPTION>EX-5.1
<TEXT>
Document 2 - file: nano-ex51_10.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>3
<FILENAME>nano-ex231_7.htm
<DESCRIPTION>EX-23.1
<TEXT>
Document 3 - file: nano-ex231_7.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>g4nlxwdsddgi000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: g4nlxwdsddgi000001.jpg

</DOCUMENT>
</SEC-DOCUMENT>