Commitments and Contingencies - Textual (Details) - USD ($)	12 Months Ended
	Dec. 26, 2015	Dec. 27, 2014	Dec. 28, 2013
Long Term Purchase Commitment [Line Items]
Liabilities recorded for obligations	$ 0	$ 0
Rent expense	1,700,000	2,000,000	$ 2,200,000
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member]
Long Term Purchase Commitment [Line Items]
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value	1,500,000	$ 2,400,000
Inventories [Member]
Long Term Purchase Commitment [Line Items]
Purchase commitment	24,900,000
Inventories [Member] | Zygo Corporation [Member]
Long Term Purchase Commitment [Line Items]
Purchase commitment, estimated future amount	$ 1,800,000