0001407682-21-000122.txt : 20211005 0001407682-21-000122.hdr.sgml : 20211005 20211005161731 ACCESSION NUMBER: 0001407682-21-000122 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20211001 FILED AS OF DATE: 20211005 DATE AS OF CHANGE: 20211005 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Harlow James CENTRAL INDEX KEY: 0001886460 FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 001-39110 FILM NUMBER: 211306836 MAIL ADDRESS: STREET 1: 16 JONSPIN RD CITY: WILMINGTON STATE: MA ZIP: 01887 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: ONTO INNOVATION INC. CENTRAL INDEX KEY: 0000704532 STANDARD INDUSTRIAL CLASSIFICATION: MEASURING & CONTROLLING DEVICES, NEC [3829] IRS NUMBER: 942276314 STATE OF INCORPORATION: DE FISCAL YEAR END: 1226 BUSINESS ADDRESS: STREET 1: 16 JONSPIN ROAD CITY: WILMINGTON STATE: MA ZIP: 01887 BUSINESS PHONE: 9782536200 MAIL ADDRESS: STREET 1: 16 JONSPIN ROAD CITY: WILMINGTON STATE: MA ZIP: 01887 FORMER COMPANY: FORMER CONFORMED NAME: Onto Innovation Inc. DATE OF NAME CHANGE: 20191025 FORMER COMPANY: FORMER CONFORMED NAME: NANOMETRICS INC DATE OF NAME CHANGE: 19920703 4 1 edgardoc.xml PRIMARY DOCUMENT X0306 4 2021-10-01 0 0000704532 ONTO INNOVATION INC. ONTO 0001886460 Harlow James C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 0 0 0 1 Chief Operating Officer Common Stock 2021-10-01 4 A 0 4107 0.0 A 4107 D Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date. By: /s/ Robert A. Koch For: James Harlow 2021-10-05