<SEC-DOCUMENT>0001257815-23-000005-index.html : 20230124
<SEC-HEADER>0001257815-23-000005.hdr.sgml : 20230124
<ACCEPTANCE-DATETIME>20230124162104
ACCESSION NUMBER:		0001257815-23-000005
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20230124
FILED AS OF DATE:		20230124
DATE AS OF CHANGE:		20230124

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Kelley Stephen Douglas
		CENTRAL INDEX KEY:			0001443674

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		23548389

	MAIL ADDRESS:	
		STREET 1:		1900 S. PRICE ROAD
		CITY:			CHANDLER
		STATE:			AZ
		ZIP:			85286

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: edgardoc.html

Document 1 - RAW XML: edgardoc.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>exhibit24.txt
<DESCRIPTION>EDGAR SUPPORTING DOCUMENT
<TEXT>
Document 2 - file: exhibit24.txt

</DOCUMENT>
</SEC-DOCUMENT>