<SEC-DOCUMENT>0001209191-15-014953-index.html : 20150218
<SEC-HEADER>0001209191-15-014953.hdr.sgml : 20150216
<ACCEPTANCE-DATETIME>20150217205847
ACCESSION NUMBER:		0001209191-15-014953
CONFORMED SUBMISSION TYPE:	5
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20141231
FILED AS OF DATE:		20150217
DATE AS OF CHANGE:		20150217

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			NANOMETRICS INC
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1227

	BUSINESS ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
		BUSINESS PHONE:		408-435-9600

	MAIL ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Andreson Jeff
		CENTRAL INDEX KEY:			0001403083

	FILING VALUES:
		FORM TYPE:		5
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-13470
		FILM NUMBER:		15625699

	MAIL ADDRESS:	
		STREET 1:		3560 BASSETT STREET
		CITY:			SANTA CLARA
		STATE:			CA
		ZIP:			95054
</SEC-HEADER>
<DOCUMENT>
<TYPE>5
<SEQUENCE>1
<FILENAME>doc5.xml
<DESCRIPTION>FORM 5 SUBMISSION
<TEXT>
Document 1 - file: doc5.html

Document 1 - RAW XML: doc5.xml

</DOCUMENT>
</SEC-DOCUMENT>