<SEC-DOCUMENT>0001193125-19-275593-index.html : 20191028
<SEC-HEADER>0001193125-19-275593.hdr.sgml : 20191028
<ACCEPTANCE-DATETIME>20191028084810
ACCESSION NUMBER:		0001193125-19-275593
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		20
CONFORMED PERIOD OF REPORT:	20191025
ITEM INFORMATION:		Completion of Acquisition or Disposition of Assets
ITEM INFORMATION:		Notice of Delisting or Failure to Satisfy a Continued Listing Rule or Standard; Transfer of Listing
ITEM INFORMATION:		Material Modifications to Rights of Security Holders
ITEM INFORMATION:		Changes in Control of Registrant
ITEM INFORMATION:		Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers
ITEM INFORMATION:		Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year
ITEM INFORMATION:		Amendments to the Registrant's Code of Ethics, or Waiver of a Provision of the Code of Ethics
ITEM INFORMATION:		Regulation FD Disclosure
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20191028
DATE AS OF CHANGE:		20191028

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		191171274

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>d823487d8k.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: d823487d8k.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-3.1
<SEQUENCE>2
<FILENAME>d823487dex31.htm
<DESCRIPTION>EX-3.1
<TEXT>
Document 2 - file: d823487dex31.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-3.2
<SEQUENCE>3
<FILENAME>d823487dex32.htm
<DESCRIPTION>EX-3.2
<TEXT>
Document 3 - file: d823487dex32.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-3.3
<SEQUENCE>4
<FILENAME>d823487dex33.htm
<DESCRIPTION>EX-3.3
<TEXT>
Document 4 - file: d823487dex33.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-14.1
<SEQUENCE>5
<FILENAME>d823487dex141.htm
<DESCRIPTION>EX-14.1
<TEXT>
Document 5 - file: d823487dex141.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-14.2
<SEQUENCE>6
<FILENAME>d823487dex142.htm
<DESCRIPTION>EX-14.2
<TEXT>
Document 6 - file: d823487dex142.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>7
<FILENAME>d823487dex991.htm
<DESCRIPTION>EX-99.1
<TEXT>
Document 7 - file: d823487dex991.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>8
<FILENAME>onto-20191025.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
<TEXT>
Document 8 - file: onto-20191025.xsd

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>9
<FILENAME>onto-20191025_def.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION DEFINITION LINKBASE
<TEXT>
Document 9 - file: onto-20191025_def.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>10
<FILENAME>onto-20191025_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
<TEXT>
Document 10 - file: onto-20191025_lab.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>11
<FILENAME>onto-20191025_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
<TEXT>
Document 11 - file: onto-20191025_pre.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>g82348700555.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: g82348700555.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>13
<FILENAME>0001193125-19-275593-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 13 - file: 0001193125-19-275593-xbrl.zip

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>d823487d8k_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 14 - file: d823487d8k_htm.html

Document 14 - RAW XML: d823487d8k_htm.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>15
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 15 - file: R1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>17
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 17 - file: Financial_Report.xlsx

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>18
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 18 - file: Show.js

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>19
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 19 - file: FilingSummary.html

Document 19 - RAW XML: FilingSummary.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>20
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 20 - file: report.css

</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>21
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 21 - file: MetaLinks.json

</DOCUMENT>
</SEC-DOCUMENT>