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Inventories (Details) (USD $)
In Thousands, unless otherwise specified
Jun. 30, 2012
Dec. 31, 2011
Component of inventories    
Raw materials and sub-assemblies $ 23,629 $ 24,963
Work in process 7,844 11,143
Consignment inventory 10,769 8,910
Finished goods 3,137 7,244
Inventories 45,379 52,260
Inventories-delivered systems 1,850 1,637
Total inventories $ 47,229 $ 53,897